光学接触式微型三维测量系统

A Micro 3-D Opto-tactile Measuring System

本文介绍了一种集光学方法的高准确度和快速性及机械接触方法的可靠性和不受材料特性影响的单一性优点于一体的光学接触式微型三维测量系统 ,用于测量微型工件的三维几何参数。该系统测头直径为 40～ 10 0 μm,测量准确度优于 1μm,测量力小于 10 μN。

A system for measuring the 3 D geometry parameter of miniature components down to submilimeter size level is presented. It combines the advantages of optical non contact method and mechanical contact one. The diameter of stylus ball is from 40μm to 100μm. The accuracy of the system is better than 1μm, and the measuring force is less than 10μN. The 3 D geometry parameters of typical miniature components are measured on CMMs for the first time.