摘要
晶体材料的深入研究加速了现代科学技术的发展,其需求量也迅速增加。在很多应用领域要求晶体的表面超光滑,因此晶体表面处理和加工成为目前研究的热点。介绍了几种典型光学晶体(蓝宝石晶体、铌酸锂晶体、三硼酸锂晶体、碲锌镉晶体、氧化镁晶体、碳化硅晶体和锑化铟晶体)化学机械抛光的最新研究成果,并探讨了光学晶体化学机械抛光存在的问题及发展趋势。
Intensive investigation on crystal materials accelerated the development of modern science and technology, and the demand for various crystals has been increasing. The surface processing of crystals has become a research focus because ultra-smooth surface is needed in many application fields. In this research, we introduce the development of chemical mechanical polishing of a few kinds of crystals including saphire, LiNbO3 , LiB305 , CdZnTe, MgO, SiC and InSb, discuss the existing problems and the developing trend in the CMP field of the crystals.
出处
《金刚石与磨料磨具工程》
CAS
2012年第1期23-28,33,共7页
Diamond & Abrasives Engineering
基金
国家自然科学基金资助项目(50975002)
关键词
晶体
表面加工
化学机械抛光
crystals
surface processing
chemical mechanical polishing
