摘要
光谱共焦位移传感器是一种高精度、非接触式位移传感器。本文讨论了光谱共焦法用于位移测量的基本原理,用Zemax光学设计软件完成了一个镜头组的设计,并给出了光谱共焦位移传感器镜头组的设计方法以及像差分析。该镜头组采用密接透镜结构,工作波段为486.13nm-656.27nm,测量范围约为91μm,轴向响应FWHM优于5μm。通过线性回归分析得出波长与位移间判定系数为0.99523,在测量范围内,位移与波长间的线性关系较好。
The chromatic confocal displacement sensor is a kind of non-contact displacement sensors with high precision.In this paper,the chromatic confocal principle for displacement measurement is studied.We design a set of refractive lenses based on Zemax and the design method of the chromatic confocal sensor lens and the geometrical aberration analysis of optical system is proposed.The set of lenses,whose working wavelength range is 486.13nm-656.27nm,has a measurement range of about 91μm and FWHM less than 5μm.It can be obtained from the simulation and calculation result that linearity of the sensor is well.
出处
《工具技术》
2012年第2期81-83,共3页
Tool Engineering
关键词
位移传感器
光谱共焦
轴向色差
镜头设计
displacement sensor
chromatic confocal
chromatic aberration
lens design
