高精度光栅干涉测量技术及仪器

Grating Interference Measuring Technique and Instrument with High Accuracy

在超精密测量和控制技术中 ,对测量精度提出了越来越高的要求 ,如尺寸精度 1nm和角度 0 .0 0 1″。由于光栅测量具有精度高、抗干扰能力强、寿命长和价格便宜等优点 ,最近几年光栅干涉测量技术被广泛研究和使用。本文简单介绍几种在超精密测量和制造过程中常用的微纳米光栅干涉测量技术。

In ultra\|precision measurement and control techniques the higher and higher requirement of accuracy of measurement are put forward,for example the accuracy of size is 1 nm and for angle is 0.001″.Because the grating interference measuring technique is possessed of high accuracy,strong anti\|jamming ability,long service life and cheap price et al,it has been widely researched and used in recent years.In this paper several commonly adopted micro\|nano\|meter(atto\|meter) grating interference techniques in ultra\|precision measurement and manufacture processes are introduced.