硅芯炉速度控制系统设计方案探讨

The Study of Silicon Core Furnace's Speed Control System Design Scheme

介绍了早期硅芯炉速度控制单元,此单元多采用直流伺服控制系统。由于其中间环节复杂,信号传输慢,易受干扰,长期使用稳定性差等问题,提出了几种速度控制系统改进方案。经实验验证,采用全数字交流伺服控制系统为最佳设计方案。

This paper introduces the early silicon core furnace speed control unit,which use more DC Servo control system.Because the unit contains complex intermediate link,which slows the signal transmission,easily to be interfered,and has poor stability when it works long-term,the author proposed several kinds of speed control system improvement plan.The results of experiment indicates the Digital AC Servo control system is the best design.