ITO镀膜设备气室门阀阀板的改进设计

Improved Design of Valve Plate of Air Chamber in the Ito Coating Equipment

通过对ITO镀膜设备气室门阀阀板的结构进行改进,解决了实际生产中真空室密封性能差、阀板使用寿命短、产品质量不稳定等一系列问题。改进要点是在主动、从动阀板上增加设计了冷却水循环水道。

A series of problems, such as poor sealing of vacuum chamber, short service life of valve plate, instable quality of coated product, were overcome by improving the structure of valve plate of air-chamber in the ITO coating equipment. The main improvement is the installation of the circulating water pipe on the active valve and driven valve for cooling purpose.