基于压电陶瓷迟滞特性模型的原子力显微镜仿真平台研究

A simulation platform of atomic force microscope based on piezoelectric hysteresis model

将基于双二次拉格朗日插值方法的压电陶瓷迟滞非线性Preisach模型,加到原子力显微镜(AFM)仿真平台中,实现在任意加压情况下由于迟滞效应所产生的图像畸变的仿真,更准确地反映原子力显微镜的扫描结果,使得学生在仿真实验中能更好地掌握AFM实验的真实情况.为了校正样品图像的畸变,提出搜索求逆算法,并利用此算法对Preisach模型进行精确求逆,通过改变输入电压抵消了压电陶瓷迟滞效应带来的非线性特性.仿真结果表明,该方法有效地校正了样品图像的畸变.

With the Preisach hysteresis model of piezoelectric ceramics, which is based on the biuadratic Lagrange interpolation method, added in ,the atomic force microscope （AFM） simulation platform can simulate the scanning image distortion caused by the hysteresis effect in any voltage, and demonstrate the real scanning process of AFM more accurately for students in the experiments. To correct the distortion of the scanning images, the searching inversion algorithm is proposed to achieve the precise inverse Preisach model, and the corresponding input voltage is set to offset nonlinearity of the hysteresis effect, the simulation results show these methods effectively correct image distortion.