不同热处理方式对Li_(1.3)Al_(0.3)Ti_(1.7)(PO_4)_3薄膜性质的影响

Synthesis and Characterization of Li_(1.3)Al_(0.3)Ti_(1.7)(PO_4)_3 Thin Films Heated by Different Annealing Techniques

采用快速退火和常规退火两种不同热处理方式制备Li1.3Al0.3Ti1.7(PO4)3薄膜,用X射线衍射、扫描电子显微镜、循环伏安及交流阻抗等技术分析检测薄膜物相、形貌、电化学窗口、离子电导率及电导活化能。结果表明,两种退火方式制备的薄膜均为纯相Li1.3Al0.3Ti1.7(PO4)3,制备的薄膜均匀、无龟裂,但采用快速退火制备的薄膜晶粒比采用常规退火制备的薄膜要小,薄膜更光滑更致密。两种退火方式制备的薄膜电化学窗口都超过了2.4 V,薄膜离子电导率分别为2.7×10-6 S/cm和1.4×10-6 S/cm。采用快速退火制备的Li1.3 Al0.3 Ti1.7(PO4)3薄膜离子电导活化能比采用常规退火制备的薄膜要小。

Li1.3A10.3 Ti1.7 （PO4）3 thin films were prepared by rapid thermal annealing （RTA） and conventional furnace annealing （CFA）. The phase and surface morphology of the prepared films were characterized by means of X-ray diffraction and scanning electron microscope. The electrochemical window, ionic conductivity and activation energy were measured by cyclic voltammetry, and A. C. impedance spectroscopy. The results show that the films prepared by RTA and CFA are homogenous and crack-free. However, the film prepared by RTA shows smaller grains and is denser than the one prepared by CFA. The electrochemical windows of the two films are more than 2. 4 V. The ionic conductivity of the films prepared by RTA and CFA is 2. 7 x ＇10-6 S/era and 1.4 x 10-6 S/cm, respectively. The activation energy of the film prepared by RTA is slightly smaller than the one prepared by CFA.