摘要
为了使2维振镜扫描系统在大角度扫描状态下减小非线性畸变误差,针对纯理论校正无法克服系统自身各种误差的缺陷,提出了基于坐标角度映射关系的校正模型。利用曲面最小二乘拟合的方法,建立坐标点的误差补偿曲面可以有效提高校正精度,仿真测试的平均误差在15μm左右,利用分段线性插值插入网格校正表可以大幅提高扫描速率,扫描速率达到25m/s左右。结果表明,该模型对于扫描非线性实时动态校正有一定的效果。
In order to decrease nonlinear distortion error in the state of wide-angle scanning of a two-dimension galvanometer scanning system, aiming at the defects of various errors in the system itself which cannot be overcame absolutely by single theoretical correction model, the correction model based on mapping connection between coordinates and angles was put forward. The error compensation surface of coordinate points was established by means of the least square surface fitting method, and the correction precision was effectively improved,the error of test points could be limited around 15um . The scanning speed can be obviously increased by the grid correction table plugged by pieeewise linear interpolation in the scanning plane, and the scanning speed can get to 25m/s or so. Simulation results show that the model is effective for real-time dynamic adjusting of nonlinear scanning.
出处
《激光技术》
CAS
CSCD
北大核心
2012年第2期179-182,187,共5页
Laser Technology
关键词
激光技术
振镜扫描
综合误差
最小二乘
网格
校正模型
laser technique
galvanometric scanning
composite error
least-square
grid
correction model
