单驱动变曲率单晶硅反射镜的研究

Research of single crystal silicon mirror with variable curvature controlled by a single actuator

为了解决高能激光器输出光束的光束质量随时间蜕变的问题,提出了一种主动光学元件的结构,只使用一个驱动器使反射镜的曲率产生可控制的改变,用以补偿高能激光器中增益介质或光学元件因热效应而产生的球差。通过理论模拟计算和实验研究对比验证,这种结构能够使单晶硅基底的反射镜产生微小变形,通过精确控制驱动器,可以使反射镜产生所需要的曲率变化。结果表明,这种主动光学元件可以用于谐振腔内补偿高能激光器中热效应产生的球差项的影响。

In order to compensate thermal effect of high energy laser system, using a single actuator to control curvature of a single crystal silicon mirror, the deformable mirror can compensate spherical aberration induced by thermal effect of the gain medium, or optical components. The mirror was modeled using analytical solutions as well as finite element analysis software, deformation of the mirror was measured using an interferometer, the result showed good agreement with the models. Simulation results show that the active optical component can be used to compensate the spherical aberration induced by the thermal effect in a high energy laser.