摘要
本文用解析法计算了40 Cr钢中注氮离子的平均投影射程,标准偏差和浓度分布。同时和AES的实验结果进行比较,表明在—般情况下解析法是计算平均投影射程和标准偏差的一种简便而有效的方法.
The paper deals with the calculation of the average projected range,the standard devia-tion and the concentration distribution of nitrogen ions implanted in the 40Cr steel byanalytic method.The results of calculation are compared with the experimental ones of AESanalysis,which shows that the analytic method is generally a simple and effective one for cal-culation of the average projected range and the standard deviation.
出处
《中国纺织大学学报》
CSCD
1990年第3期69-76,共8页
Journal of China Textile University
关键词
注氮
深度
测定
计算
浓度
40CR钢
steel
ion implantation
standard deviation
concentration
projected range
