能量色散X射线荧光光谱仪现状及其发展趋势

The Actualities and Trend of Energy Dispersive X-Ray Fluorescence Spectrometry

能量色散X射线荧光光谱仪被广泛用于许多部门和领域,已成为理化检测、野外现场分析和过程控制分析等的重要工具。文中介绍了现代能量色散X射线荧光光谱仪主要性能指标,综述了能量色散X射线荧光光谱仪的硬件和软件研制现状,简述了多种新型的能量色散型X射线荧光光谱仪,并对其发展趋势与前景进行了展望。

The energy dispersive X ray fluorescence spectrometry（EDXRF） has been used in some departments and fields,and it has become an important tool for the physics and chemistry laboratory.The main performance index of the present EDXRF spectrometry has been introduced,and its development status of the hardware and the software has been summarized.Some new model EDXRF products has been described,the trend and the prospect of the EDXRF has been expected.