类金刚石薄膜的喇曼光谱高斯分解研究

Research on Gauss Devolution of Raman Spectrum of Diamond Like Carbon Thin Film

采用过滤式阴极电弧沉积的方法获得类金刚石薄膜 .喇曼光谱的分析表明 ,这种薄膜是典型的无氢类金刚石薄膜 .喇曼光谱的高斯分解研究表明 :随着偏压的增加 ,D线和 G线的位置 μd、μg 向低频移动 ,半高宽 Fg 减小、Fd 增加 ,在偏压为 10 0 V时 ,D线和 G线强度比 Id/ Ig 有最大值 .

The diamond like carbonfilm is achieved by filtered cathode arc deposition. The results of Raman spectrum tests show that this kind of diamond like carbon film is a typical nonhydrogen diamond like carbon film. The Gauss devolution algorithm is studied in this paper and the results show: the position of D line and G line increase with the increasing of applied voltage. The intensity ratio of I d / I g has the highest value on the bias voltage of 100V.