金属等离子体浸没离子注入改善9Cr18轴承钢表面耐磨性的研究

Improvement of Tribological Properties of 9Cr18 Steel by Metal Plasma Immersion Ion Implantation

采用新改进的阴极弧金属等离子体源 ,对 9Cr18轴承钢进行了金属等离子体浸没离子注入 (PIII)处理。首先将Ti,Mo和W离子分别注入到 9Cr18钢的表面 ,然后再对其进行N等离子体浸没离子注入 ,从而在 9Cr18钢表面形成了一层超硬耐磨的改性层。对PIII处理后的试样进行了显微硬度和磨损特性测试 ,结果表明 ,经PIII处理后的试样表面的显微硬度和耐磨性显著提高 ,而其中经Ti和Mo注入再进行N离子注入的试样效果更为明显。与仅进行N离子注入的试样相比 ,金属加N离子注入的试样表面耐磨性提高幅度更大 ,表明金属PIII在改善 9Cr18钢表面性能方面具有广阔的应用前景。XPS分析结果表明 ,PIII处理后试样表面形成了超硬的氮化物相 ,它们在改善材料表面特性中起到了重要的作用。

The 9Cr18 bearing steel surface was modified with metal plasma immersion ion implantation(PIII).After titanium,mo lybdenum and tungsten ions were implanted into the surface consecutively with a modified cathodic arc plasma source,nitrogen ions were im planted by PIII to grow a super hard,wear resist surfaces.The tribological properties of the modified 9Cr18 surfaces were then studied.Our re sults show that PIII may considerably improve the microhardness and wear properties of the steel surfaces.Moreover,the samples implanted with(Ti+N) and (Mo+N) have the best results.As compared with the samples treated only with nitrogen PIII,the metal ions implanted samples,after nitrogen PIII,have much higher wear resistance.We may conclude that metal PIII is an effective technique to improve the tribological pro perties of 9Cr18 bearing steel.The X ray photoemission spectroscopy(XPS) results reveal that some nitride phases have been formed in the sur face layers.We suggest that these nitride phases play a key role in the improvement of surface properties of 9Cr18 steel.