磁控直流辉光等离子体放电特性

Magnetic control of the constant-current glow discharge plasma characteristics

本文利用单探针诊断等离子体参数来研究自行设计的磁控直流辉光等离子体实验装置的放电特性,从而得出电子密度与气体压强、电子密度分布与磁场位型以及磁场强度等的关系.另外,用有限元的方法对线圈通电产生的磁场进行数值计算,模拟出不同接线方式的两种磁场位型分布.通过实验得出这两种不同的位型的磁场均对等离子体的状态有一定的"控制"作用,而且这种"控制"作用与现有理论相符合.

In this paper,We measure the plasma parameters using a single probe to study the characteristics of our designed magnetic control direct current glow discharge experimental device.We can obtain the relationship between the electron density and pressure, the electron density distribution and the magnetic field type,the electron density distribution,the magnetic field strength,etc.In addition,magnetic field generated by coils is calculated by the finite element method,through which the distributions of two magnetic fields with different connection modes are simulated.In experiment the states of the plasma are controled partly by these two different types of magnetic field position,and this ＂control＂ role is consistent with existing theory.