摘要
针对传统微电子专业实验设备昂贵、实验周期长、效果不理想等缺点,提出了一种通过半导体工艺和器件的计算机辅助技术(TCAD)进行虚拟实验教学的方法。该方法速度快,可以在实验前后和过程中,直接观察材料和器件的形貌和内外参数,是对理论课程的实践和扩充。介绍了合理安排实验规划方案和解决实施中遇到问题的思路。
A teaching method using virtual experiments based on technology computer aided design（TCAD） is presented to overcome the problems of conventional microelectronic experimental teaching,such as expensive equipment,long experiment time and unsatisfactory effects.The students can obtain the inner and outer parameters of the materials or devices at any time of experiment.This article also discusses how to layout the experiments rationally and solve the difficulties of teaching.
出处
《实验技术与管理》
CAS
北大核心
2012年第2期78-80,共3页
Experimental Technology and Management
基金
扬州大学自然科学基金资助项目(2006XJJ02)
扬州大学教改基金资助项目(2011-12)
关键词
TCAD技术
微电子实验教学
虚拟实验
technology CAD
microelectronic experimental teaching
virtual experiments
