太赫兹微加工波导滤波器

Terahertz Micromachined Waveguide Filter

该文提出应用微加工(Micromachining)技术设计制作太赫兹6阶并联电感耦合波导带通滤波器的方法。立足于现有工艺条件,通过分析加工因素对滤波器电磁性能的影响,将工艺和设计参数相互折中达到优化设计的目的,避免因工艺原因造成的器件性能急剧恶化,最终得到插入损耗小、可靠性好、可集成的太赫兹滤波器。采用微加工深刻蚀(ICP)、溅射电镀金属、键合等工艺步骤,最终制作完成的单个微加工滤波器划片后体积为24.0 mm×5.0 mm×1.66 mm。应用可调测试夹具固定微加工滤波器,通过功率计测试其功率衰减,得到其中心频率为141.5 GHz,3dB带宽为10.6%,中心频率处功率衰减小于1 dB,验证了工艺方法的有效性。

This paper presents the method of designing and fabricating 6-pole TeraHertz（THz） iris band-pass filter by adopting micromachining technology.Based on the existing process conditions,through analyzing the influence of process factors on electromagnetic property of filters,the process and designing parameters are mutually compromised to avoid sharp deterioration of device performance due to process factors so that the design can be optimized,and ultimately the integratable THz filter of small insertion loss and high reliability is obtained.By applying the processing methods including Inductively Coupled Plasma（ICP） etching,evaporating,electroplating gold and bonding,the single after-dicing micromachined filter with the volume of 24.0 mm × 5.0 mm × 1.66 mm is fabricated.The filter is fixed by applying tunable measurement clamp,and the power meter is adopted to test its power attenuation.Measurements results show that the center frequency of a 10.6% 3 dB fractional bandwidth is 141.5 GHz,and the power attenuation is less than 1 dB at 141.5 GHz,thus proving the effectiveness of the proposed processing method.