摘要
非蒸散型吸气剂已经广泛被应用于密封的真空器件和粒子加速器来达到需要的真空。本文介绍了St70 7非蒸散型吸气剂 (NEGs)的吸气机理、操作程序和吸气性能 ,并且把一些实验结果给以说明。
Non Evaporable Getters (NEGs) have been used extensively in sealed off vacuum devices and particle accelerators to assure the desired vacuum level. This article will introduce the mechanism of the getting process, the procedure of operation and performance of sorption for St707 NEGs, moreover some experimental results are explained.
出处
《真空》
CAS
北大核心
2000年第1期26-28,共3页
Vacuum
