ITO多层减反膜系设计及制备研究进展

Progress in Design and Fabrication of ITO Multilayer Anti-reflective Coating

玻璃基片表面沉积ITO薄膜赋予玻璃诸多优异的电学、光学性能,但ITO薄膜的沉积也使得玻璃在可见光区透过率下降10%左右,在近红外区呈现高吸收、强反射现象,一定程度上弱化了ITO玻璃的部分应用。通过ITO多层减反膜的设计可以有效地解决上述问题,拓宽ITO薄膜玻璃的应用范围。本文首先阐述ITO薄膜沉积后光学曲线及该曲线各波段光学性能变化的理论解释,进而概述常规的减反膜系设计方法及膜层材料选择,并重点介绍ITO多层减反膜系的相关研究动态,本文结尾对ITO多层减反膜的设计和制备进行了展望。

ITO coatings deposited on glass substrates endow the substrates with excellent electrical and optical properties,but ITO coatings reduce the transmissivity by 10% in visible light region,present high absorption and strong reflection in near-infrared region,which weakens some applications of ITO deposited glass.Design and fabrication of ITO multilayer anti-reflective coating is adopted to efficiently resolve above mentioned problems,and extend the application limitation of ITO deposited glass.Optical properties and related theoretical explanation of glass with/without ITO coating are demonstrated firstly in this paper,usual design ways of anti-reflective coatings and selection of coating materials are briefly introduced,and progress of ITO multilayer anti-reflective coatings as the focus of this paper is paid more attention,and finally the prospect of design and fabrication of ITO multilayer anti-reflective coatings is given.