摘要
We fabricated complex microfluidic devices in silica glass by water-assisted femtosecond laser ablation and sub- sequent heat treatment. The experimental results show that after heat treatment, the diameter of the microehannels is significantly reduced and the internal surface roughness is improved. The diameters of the fabricated microehannels can be modulated by changing the annealing temperature and the annealing time. During annealing, the temperature affects the diameter and shape of the protrusions in microfluidic devices very strongly, and these changes are mainly caused by uniform expansion and the action of surface tension.
We fabricated complex microfluidic devices in silica glass by water-assisted femtosecond laser ablation and sub- sequent heat treatment. The experimental results show that after heat treatment, the diameter of the microehannels is significantly reduced and the internal surface roughness is improved. The diameters of the fabricated microehannels can be modulated by changing the annealing temperature and the annealing time. During annealing, the temperature affects the diameter and shape of the protrusions in microfluidic devices very strongly, and these changes are mainly caused by uniform expansion and the action of surface tension.
基金
Project supported by the Science and Technology Foundation of Heilongjiang Province,China (Grant No. A200912)
the Program of Excellence Team in the Harbin Institute of Technology,China
