摘要
Displacement sensor based on the polarization mixture and the cavity tuning of the orthogonal polarized He-Ne laser 1.15μm is presented.The power tuning curves of He-Ne laser are irregular,and it is difficult to measure the change in cavity length.The distortion of the curves is caused by the higher relative excitation compared with the He-Ne laser at 633 nm.In view of its potential for the wider displacement measuring range,a new method of displacement sensing is developed.Experiments show that displacement measuring stability based on the method of the polarization mixture is better than that of the power tuning curves. The displacement sensor achieves the measuring range of 100 mm,resolution of 144 nm,and linearity of 7×10- 6 .
Displacement sensor based on the polarization mixture and the cavity tuning of the orthogonal polarized He-Ne laser 1.15μm is presented.The power tuning curves of He-Ne laser are irregular,and it is difficult to measure the change in cavity length.The distortion of the curves is caused by the higher relative excitation compared with the He-Ne laser at 633 nm.In view of its potential for the wider displacement measuring range,a new method of displacement sensing is developed.Experiments show that displacement measuring stability based on the method of the polarization mixture is better than that of the power tuning curves. The displacement sensor achieves the measuring range of 100 mm,resolution of 144 nm,and linearity of 7×10- 6 .
基金
supported by the National Natural Science Foundation of China under Grant Nos.60827006 and 60723004
