多晶硅氢化炉的电气系统

Electrical System of Hydrogenation Furnace for Polysilicon Production

氢化炉是西门子法生产多晶硅企业的重要设备,它可将还原炉尾气中的有毒有害物四氯化硅转化为多晶硅生产的原料三氯氢硅。本文介绍了氢化炉的主要电器设备,并根据氢化生产的流程和工艺,说明选择这些电器设备参数的原则和依据。

Hydrogenation furnace, a key system of polysilicon production with Siemens process, is used to provide conditions for hydrogenation reaction of silicon tetraehloride with trichlorosilane. In this paper, the main eleetrical equipments of hydrogenation furnace are presented. The parameters of these electrical equipments are discussed in detail in accordance of the hydrogenation process.