磁头晶片功能性镍-铁合金电镀工艺

Electroplating Process of Functional Ni-Fe Alloy Film in Hard Disk Drive Head Wafer

研制出一种可用于电脑硬盘磁头晶片功能性镍-铁合金的电镀工艺。介绍了其工艺流程,对主盐、添加剂、镀液温度、pH、电流密度、搅拌、合金成分等因素进行了筛选,并对所得镍-铁合金镀层的磁学性能进行了测试。结果表明,此镀层性能达到了磁头质量要求。该镍-铁合金电镀工艺已成功应用于电脑硬盘磁头晶片保护层加工中。

The electroplating process of functional Ni-Fe alloy used in hard disk drive head wafer process was developed.The plating procedures and parameters such as main salt,additive,bath temperature,pH value,current density,stirring condition and film composition were introduced and investigated,and the magnetic properties of Ni-Fe film was determined.The results showed that the performance of Ni-Fe alloy film could meet the requirement of hard disk drive head wafer.This Ni-Fe alloy plating process had been successfully applied in the manufacture of hard disk drive head wafer.