硅表面复合自组装膜的制备及其摩擦性能

Preparation and Tribological Properties of Self-Assembled Composite Films on Silicon Surface

采用自组装技术在单晶硅表面制备了3-氨基丙基三乙氧基硅烷(APTES)-SiO2-APTES复合膜,并对其表面的组成、结构及摩擦性能进行了表征.结果表明:复合膜表面对水的接触角约为63°,且表面平整、致密,其平均粗糙度(Ra)约为0.963nm.通过原子力显微镜(AFM)和透射电子显微镜(TEM)观察到夹层中SiO2颗粒的粒径约为20-50nm,较均匀地分布在第一层APTES膜的表面.与APTES自组装单层膜(SAMs)相比,APTES-SiO2-APTES复合膜由于纳米SiO2颗粒的引入而表现出更低的摩擦系数和更长的耐磨寿命.

Composite films of 3-aminopropyltriethoxysilane（APTES）-SiO 2 -APTES were prepared on single-crystal silicon substrates using a self-assembly technique,and then their composition,structure,and tribological properties were characterized.The results showed that the composite films had a uniform and dense surface with an average roughness（R a ）of 0.963 nm and a contact angle of 63°.The atomic force microscopy（AFM）and transmission electron microscopy（TEM）observations revealed that,in the middle layer of the composite film,silica particles of 20-50 nm in diameter were uniformly deposited on the APTES layer.Compared to the APTES self-assembled monolayers（SAMs）,the APTES-SiO 2 -APTES composite films exhibited a smaller friction coefficient and a longer wear life due to the introduction of the silica nano-particles.