摘要
为了提高油液的在线监测水平,研制了一种基于电感测量的铁磁性颗粒传感器,用MEMS工艺制作了一种平面线圈型的传感器并分析了其工作原理。设计了信号处理电路,对传感器的性能进行了实验研究。结果表明:颗粒含量在10～100 mg时,传感器具有良好的线性度,灵敏度为7.145 5 V/g,该传感器可以分辨5 mg的铁屑含量,输出稳定,为油液的在线监测提供了一种新的检测元件。
In order to improve the oil on-line monitoring, a sensor for the measurement of wearing debris was presented, which was based on inductance measurement. The planar structure sensor was made by MEMS and the operation principle was intro- duced. The signal processing circuit was designed and the performance of sensor was studied. Experimental results show that the sensor has a sensitivity of 7. 145 5 V/g and can distinguish the ferro particles of 5 mg,it provides a new component for oil on-line monitoring.
出处
《仪表技术与传感器》
CSCD
北大核心
2012年第2期3-4,11,共3页
Instrument Technique and Sensor
基金
教育部留学回国人员科研启动基金
关键词
传感器
铁磁颗粒
平面电感
在线监测
sensor
ferro particles
planar inductance
on-line monitoring
