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直线电动机粘滑闭环控制实验研究

Experimental Study on Stick-Slip Closed-Loop Control for Linear Motor
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摘要 以永磁同步直线电动机直接驱动工作台作为研究对象,其滚柱导轨机械接触摩擦力使工作台位置伺服系统表现出粘滑特性,分析了摩擦力对系统性能的影响。辨识了该位置伺服系统的力常数(13.37 N/A)和机械时间常数(128 ms)。基于该系统的模型和辨识参数,采用极点配置法设计了I-PD控制器,闭环极点为-2π×20时,可以有效地抑制粘滑,其定位误差可以达到光栅传感器的分辨率0.5μm。 The worktable driven directly by a permanent magnetic synchronous linear motor was studied, The stick-slip phenomenon of the position servo system was shown by the mechanical contact friction with linear guide. The effects of friction on the system performance were analyzed. Force constant( 13.37 N/A) and mechanical time constant( 128 ms) were identified. I-PD controller was designed by pole placement based on the linear model and identified parameters. Stick-slip was suppressed and the positioning error of the servo system achieved the grating's resolution 0.5 μm through choosing an appropriate closed-loop pole -2π×20.
出处 《微特电机》 北大核心 2012年第3期4-6,共3页 Small & Special Electrical Machines
关键词 粘滑 摩擦力 直线电动机 位置伺服控制 stick-slip friction linear motor position servo control
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参考文献9

  • 1Mohan C B,Divakar C,Venkatesh K,et al.Design and develop-ment of an advanced linear recipro-cating tribometer[J].Wear,2009,267:1111-1116.
  • 2Bilkay O,Anlagan O.Computer simulation of stick-slip motion inmachine tool slideways[J].Tribology,2004,37:347-351.
  • 3毛军红,李黎川.电磁驱动器与矩形静压空气止推轴承混合支承工作台的设计与实现[J].科学通报,2008,53(18):2251-2256. 被引量:2
  • 4Tan Xiaobo,Modafe A,Ghodssi R.Measurement and modeling ofdynamic rolling friction in linear microball bearings[J].ASME,2006,128:891-898.
  • 5Chen J S,Chen K C,Lai Z C,et al.Friction characterization andcompensation of a linear-motor rolling-guide stage[J].Interna-tional Journal of Machine Tools&Manufacture,2003,43:905-915.
  • 6Chen C L,Jang M J,Lin K C.Modeling and high-precision con-trol of a ball-screw-driven stage[J].Precision Engineering,2004,28:483-495.
  • 7Yau Her-terng,Yan Jun-juh.Adaptive sliding mode control ofa high-precision ball-screw-driven stage[J].Nonlinear A-nalysis:Real World Applications,2009,10:1480-1489.
  • 8Chen J S,Chen K C,Lai Z C,et al.Friction characterization andcompensation of a linear-motor rolling-guide stage[J].Interna-tional Journal of Machine Tools&Manufacture,2003(43):905-915.
  • 9毛军红,罗俊航,姜强,谢友柏.一种永磁直线电机的永磁体阵列设计[J].西安交通大学学报,2007,41(3):353-357. 被引量:9

二级参考文献16

  • 1李黎川,丁玉成,卢秉恒.超精密磁悬浮工作台及其解耦控制[J].机械工程学报,2004,40(9):84-88. 被引量:32
  • 2Stout K J, Barrans S M. The design of aerostatic bearings for application to nanometer resolution manufacturing machine systems. Tribo Inter, 2000, 33:803--809
  • 3Kwan P Y B, Post B J. A tolerancing procedure for inherently compensated, rectangular aerostatic thrust bearings. Tribo Inter, 2000, 33:581--585
  • 4Slocum A, Basaran M, Cortesi R, et al. Linear motion carriage with aerostatic bearings preloaded by inclined iron core linear electric motor. Precis Eng, 2003, 27:382--394
  • 5Shirmo H, Hashizume H, Yoshioka H, et al. X-Y-θ nano-positioning table system for a mother machine. CIRP, 2004, 53:337--340
  • 6Peijnenburg A T A, Vermeulen J P M, Eijk van J. Magnetic levitation systems compared to conventional bearing systems. Microelectron Eng, 2006, 83:1372--1375
  • 7Jung K S, Baek Y S. Characteristics comparison of planar stages using repulsive and attractive type of surface actuator principle. Sensor Actuat A-Phys, 2005, 117:173--182
  • 8Kim W, Trumper D L. High-precision magnetic levitation stage for photolithography. Precis Eng, 1998, 22:66--77
  • 9Lee S Q, Gweon D G. A new 3-DOF Z-tilts micropositioning system using electromagnetic actuators and air bearings. Precis Eng, 2000, 24:24--31
  • 10Li L. Eddy-current displacement sensing using switching drive where baseband sensor output is readily available. IEEE Trans Instrum Meas, doi" 10.1109/TIM.2008.925004

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