摘要
采用溶胶-凝胶工艺，将LiCl湿敏组元复合到SiO2-Al2O3玻璃先驱体中，用提拉法镀膜，经过适当的热处理，可以获得具有纳米结构和良好湿敏特性的LiCl／玻璃基薄膜。湿敏特性研究表明该类薄膜制得的传感器可在全湿范围内实现对湿度的测量。
Sol-gel dipping method process was used to prepare LiCL/SiO2-Al2O3 humidity sensing film with nano-camposite structure and good humidity sensing property by a suitable hea-treatment. Results of humidity sensing test show that the film could be used as humidity sensor in whole RH range.
出处
《硅酸盐通报》
CAS
CSCD
2000年第1期39-42,共4页
Bulletin of the Chinese Ceramic Society
关键词
氯化锂
薄膜
湿敏
溶胶凝胶
复合薄膜
玻璃
lithium chlorinate
thin film
nano-composite
humidity sensor
