γ'-(Fe_(1-x)Ni_x)_4N薄膜结构及其磁学性能

Structure and Magnetic Properties of Nanocrystalline γ′-(Fe_(1-x)Ni_x)_4N Thin Films

采用直流磁控溅射方法,在Si(100)单晶衬底上制备不同质量分数Ni掺杂的γ'-(Fe1-xNix)4N纳米晶薄膜样品,并利用能谱分析、X射线衍射(XRD)、扫描电子显微镜(SEM)和振动样品磁强计(VSM)测试分析样品中Fe与Ni的原子比、结构、形貌及磁学性能.结果表明,在样品中掺杂Ni可提高材料的结构稳定性,优化材料的软铁磁性能.

Nanocrystalline γ′-（Fe1-xNix）4N thin films with different Ni mass fractions were synthesized on single crystal Si（100） substrate by facing target magnetron sputtering.The Fe/Ni atom ratio,structure,morphology and magnetic properties were characterized by means of X-ray diffraction（XRD）,scanning electron microscopy（SEM） and vibrating sample magnetometer（VSM）.The results indicated that the stabilities of the structure were improved and the soft magnetic properties were optimized by doping Ni in the sample.