蒙特卡罗模拟在单颗粒扫描电镜-能谱定量分析中的应用研究

Research on the application of Monte Carlo simulation in single particle SEM-EDS quantitative analysis

使用扫描电镜-能谱分析技术在10kV/1nA条件下分别对微束分析国家标准样品、K411玻璃微球和自制的颗粒标准样品进行了测试,并用CASINO程序对其进行了元素定量计算,以检验蒙特卡罗模拟在单颗粒分析中的适用性。研究结果表明:(1)无论是块状还是颗粒标准样品,CASINO程序给出的定量计算结果总体上都明显优于能谱仪自带的XPP程序;(2)相比归一化法,CASINO程序能显著地校正颗粒效应;(3)对于Cu、Zn等KαX射线荧光产额较低的元素,在其含量较低时最好使用Lα线进行定量计算;(4)对于Cr2O3等存在严重谱线重叠的样品,进行相应的重叠校正也可得到较为准确的定量计算结果。

To verify the availability of Monte Carlo simulation in the single particle SEM-EDS quantitative analysis,we measured a large number of national reference materials for micro-beam analysis,K411 glass microsphere,and self-prepared particle standard samples in the conditions of 10kV/1nA,and calculated their elemental composition using CASINO program.The results revealed that CASINO program provided more accurate and reliable data relative to XPP program on the whole,for both bulk and particle standard samples.Compared with normalization method,CASINO program can correct the particle effects significantly.Because of their lower Kα X-ray fluorescence yield,it＇s better to use Lα line instead of Kα line to quantify the elements such as copper and zinc.If appropriate spectral overlapping correction is applied,CASINO program can also provide accurate data for samples such as TiN and Cr2O3.