摘要
真空系统是场发射枪透射电镜的重要组成部分。按照场发射枪透射电镜对真空提出的要求,规划了真空系统的构成,设计了抽真空的流程。采用真空泵并行抽气的工作方式,缩短真空抽气时间,提高真空泵的利用率。通过隔离阀的通断实现了真空泵抽气对象的切换,通过计算机程序控制PLC实现了真空的自动抽气。通过测试,能够达到预定的真空度要求。
Vacuum system is an important component of field emission transmission electron microscope （FETEM）. According to the vacuum demand by the FETEM, the vacuum system structure and pumping flow were designdd, which adopted the parallel pumping method. The method shortened the pumping time and improved the utilization of vacuum pump. For practical automatic pumping, the pumping objects of vacuum pump were exchanged by controlling the open or close of the isolation valve with PLC. The experimental resuhs indicate that the vacuum system .can fulfill the pre-established vacuum demand.
出处
《真空》
CAS
2012年第2期5-9,共5页
Vacuum
基金
国家科技支撑计划(批准号2:006BAK03A24)
中央高校基本科研业务费专项资金项目(项目编号:YWF-11-02-044)
