EBW-真空抽气系统设计

Design of vacuum pumping system for electron beam welding

大抽速的真空抽气系统是大型电子束焊接设备(electron beam welding,EBW)中必不可少的组成部分。本文介绍了一个大型电子束焊设备中真空抽气系统的组成及其设计思路、方法,并对此真空抽气系统所能得到的本底真空度、工况真空度以及各阶段的抽气时间进行了详细的计算。为大型真空设备的研制提供一个有益的思路和便捷的方法。

The high speed vacuum pumping system is a essential part of a large-scale electron beam welding equipment. This article describes the components of a vacuum pumping system and the design ideas and methods. A detailed calculation of the background pressure, condition pressure and pumping time of all stages was carried out, which provides a useful idea and convenient method to develop large-scale vacuum equipment.