氮化物硬质涂层中Cr、Ti和Al元素对摩擦磨损特性的影响

Effects of chromium,titanium and aluminum on the friction and wear properties of nitride hard coatings

利用四靶闭合场非平衡磁控溅射(CFUBMS)技术在石英玻璃和抛光不锈钢片两种基底上制备含有Cr、Ti和Al元素组合的各种氮化物涂层。采用摩擦磨损仪测试涂层摩擦系数,应用金相显微镜对各个涂层磨痕形态进行分析,结果表明TiN、CrN、TiAlN、CrAlN以及CrTiAlN涂层的摩擦系数依次减小,耐磨特性依次提高;结合涂层的X射线光电子能谱分析,可以得到含有Al元素涂层中形成了AlN的结构,提高涂层的硬度,增加耐磨特性;在涂层中含有Cr元素形成了氧化物Cr2O3可以提高涂层自排屑能力,减小摩擦系数,增加耐磨特性,含Ti元素形成的氧化物TiO2则不利于涂层的摩擦磨损特性;由于CrTiAlN本身具有比三元氮化物更高的涂层硬度,且含有Al和Cr元素,因此该涂层具有最好的摩擦磨损性能。

A series of nitride coatings including chromium,titanium and aluminum were deposited on glass and stainless steel substrates by closed-field unbalanced magnetron sputtering. The friction coefficients were measured by tribometer and the coating wear traces were studied by the metallographic microscope. It indicates that the friction coefficients of TiN, CrN, TiAlN,CrAlN and CrTiAlN coatings decrease sequentially, while the wear resistances are enhanced. According to the X-ray photoelectron spectroscopy analysis aluminum nitride can be indentified in the nitride coatings with Al, which enhance the coating hardness and wear resistance. Chrome oxide can be found in the nitride coatings with Cr, which enhance the self-chip removal ability and decrease the friction coefficients of the coatings; titanium oxide existing in the coatings is not good for the friction and wear properties of the coatings. Chromium titanium aluminum nitride is naturally of higher hardness than the ternary nitride, as well as incorporated with chromium and aluminum, which make it the best coating with low friction coefficient and good wear resistance.