摘要
本文在平行平板脉冲调制容性耦合射频放电装置中,采用光学发射谱线诊断的方法,研究了低气压(30 Pa^65 Pa)不同磁场强度条件下氩气(Ar)放电时产生等离子体过程中电子激发温度以及Ar离子的光谱线相对强度随气压、射频功率、调制频率、占空比和磁场强度大小的变化规律。
Employing parallel plate pulse-modulated capacitive coupling RF discharge device in this paper, we investigated the changing regularity about electron excitation temperature and relative intensity of Ar^＋ optical emission spectrometry with air pressure, RF power, modulation frequency, duty cycle and magnetic field intensity using the method of optical emission spectrum diagnosis in the process of producing plasma in Ar discharge under the condition of different magnetic field intensity at low pressure （30Pa-65Pa）.
出处
《真空》
CAS
2012年第2期86-91,共6页
Vacuum
关键词
光学发射谱线诊断
脉冲调制
磁场强度
谱线相对强度
电子激发温度
optical emission spectrometry diagnosis
pulse-modulation
magnetic field intensity
relative emissionintensity
electron excitation temperature
