摘要
以等离子体放电理论为基础,依据电子密度连续性方程,电子通量方程,电子能密度连续性方程,以及电子能通量表达式,分别运用有限元法和有限时域差分法,针对氢气直流放电过程的21种碰撞反应类型进行模拟分析。确定了氢气放电所涉及的21种反应类型,在低气压、弱电离条件下仅有11种反应对过程的进行起到有效作用。所得模拟结果与实验测试结果一致。
Based on the plasma discharge theory, according to electron density continuity equation, electron flux equation, electron energy density continuity equation and electron energy flux expressions, 21 kinds of related reaction types in hydrogen plasma dc discharge process were analyzed by the finite element and finite-difference time-domain （FDTD） numerical simulation. Finally, 11 types of main reactions were confirmed, which play a major role in the low pressure and weakly ionization. The simulation results are consistent with the experimental ones.
出处
《真空》
CAS
2012年第2期96-100,共5页
Vacuum
基金
国家自然科学基金项目
项目批准号:50877003
关键词
氢气
直流放电
弱电离
等离子体
反应
hydrogen
dc discharge
weakly ionization
plasma
reaction
