纳米测量技术与微型智能仪器

Nanometer Measurement and Micro Intelligent Instrument

纳米测量技术已成为纳米技术的重要组成部分。微型智能仪器 ,是微型传感器、微型执行器和信息处理技术、微电子技术发展的必然产物 ,是微型机械电子系统的主要研究内容之一。它将使仪器的性能提高、价格下降、在生产和生活中应用更加方便。微型智能仪器具有良好的应用前景 ,是 2 1世纪仪器发展的一个重要方向。对纳米测量技术和微型智能仪器的一些普遍问题、关键技术及其发展进行论述。

Nanotechnology plays role as important as life science, information science and environment engineering in the 21st century. With the development of precise, super-precise machining, super-minuteness technology and the penetration to understanding of micro world, higher requirement for measurement technology with high reliability and precision impels the development of nanometer measurement. It has been an important constituent part of nanotechnology. As progresses of micro sensor, micro actuator, signal processing technigue and microelectronics, micro intelligent instrument has become a promising research field of MEMS. Micro intelligent instrument, believed to improve properties and decrease cost of instrument, will make our life and production more conveniently. With bright market future, micro instrument represents the instrument oriented to 21st century.