超精密机床的振动混合控制

Hybrid-type Vibration Isolation System for Ultra-precision Machine Tool

研究了空气弹簧与作动器相结合的主被动混合振动控制系统 ,空气弹簧起低通滤波作用 ,并支承机床 ,主动隔振具有高通滤波特性 ,电磁作动器的控制电压取决于绝对位移、速度、加速度和相对位移、速度、加速度。电磁作动器的动态性能对振动传递率有明显的影响。实验表明 ,混合隔振系统对超精密机床的隔振效果明显优于空气弹簧系统。

In this paper, a hybrid-type vibration isolation system that uses air-spring as passive element and electromagnetic actuator as active element is developed. The air-springs support the ultra-precision machine tool and isolate the vibration in high frequency range. Active vibration isolation system isolates the vibration in low frequency range. The control voltage is expressed as a combination of absolute as well as relative response variables. An experiment is carried out and the results demonstrate that the hybrid-type isolation system is capable of suppressing the exciting force in almost all the frequency range.