超精密加工表面微观形貌非接触在线检测系统

Non-contact On-position Measuring System for the Microscopic Texture of Machined Surface texture

介绍了专门应用于超精密车床在线检测加工表面微观形貌的检测系统。一种新式高分辨率同轴式激光轮廓仪与超精密车床的有机结合 ,突破了传统的必须卸下工件才能对其进行检测的限制 ,实现了加工与检测的一体化 ,达到了检测真正服务于加工的目的。介绍了激光轮廓仪的原理、结构以及检测系统的工作原理。实验结果表明 ,在利用超精密车床精密气浮导轨作为激光轮廓仪工作台的条件下 ,测量车削加工表面微观形貌时 ,在高度方向上的分辨率按国际惯用的均方值表示已优于 0 .1 nm。

This paper introduces a measuring system applied in an ultraprecision lathe which gives a non-contact detection of ultraprecision machined surface microscopic texture on position. With the integration of a high resolution coaxial interference laser profilometer and ultraprecision turning machine we can unify the process of manufacturing and detecting, and thus the limitation of detecting the surface microscopic texture with removing the workpiece from the lathe is broken through, and the goal of detecting being served to machining is achieved. The principle and structure of the laser profilomter, features of the lathe, operating principle of the measuring system are introduced. According to the test results, when utilizing the air slide guides of the lathe as the worktable of the laser profilometer, the vertical resolution is better than 0 1 nm(RMS), with respect to the form accuracy is also excellent. Why so high resolution is obtained the key factor is attributed to the outstanding linearity and repeatability of the lathe’s air slide guide, and the optical structure of the laser profilometer which guarantees good anti-vibration performance. Even under a disturbance of low frequency(1~2 Hz) the measuring system can carry out the sub-nanometer resolution detection with the assistance of air spring and anti-vibration behavior.