摘要
本文概述了4-4BS扫描电镜的几例故障分析及排除方法,例如真空系统、扫描电路、电压电源、水冷系统等部分故障。
This article is about the faults study and solution on the scanning electron microscope of CamScanlnstrument CamScan 4-rBS. Such as Vacuum System. Scan Circuit. EHT PowerSuppiy and Water cooled System.
出处
《现代仪器》
2000年第2期48-49,共2页
Modern Instruments
关键词
扫描电镜
真空系统
扫描电路
高压电源
故障分析
Scanning Electron Micrope Vacuum System Scan Circuit EHT Power Supply Water Cooled System
