H_2O_2直接用于溶胶凝胶法制备氧化锌薄膜

A Novel Sol-Gel Method with H_2O_2 Directly Adding for ZnO Films Preparation

通过将过氧化氢(H2O2)溶液直接加入传统Zn溶胶的方法制备了新溶胶,并在玻璃衬底上旋转涂敷制备ZnO薄膜.H2O2的加入提高了溶胶的稳定性,增加了溶胶的成膜性.采用紫外-可见分光光度计(UV-Vis),差热分析法(DTA)来分析溶胶-凝胶法制备ZnO薄膜的成膜原理;使用扫描电镜(SEM),X射线衍射(XRD),光致发光(PL)重点研究了ZnO薄膜形貌、结构与发光特性随H2O2加入量的变化规律.研究发现:H2O2的加入使得溶胶体系中生成了新的锌-过氧络合物,溶胶内部成分的改变对溶胶性质产生重要影响并将改变ZnO薄膜的成膜过程.

ZnO films were prepared by hydrogen peroxide（H2O2） treated sol-gel method and the effect of H2O2 on the sol properties and films was studied.By using this method,dense and continuous ZnO thin films with good crystallinity were prepared very simply.DTA,UV-Vis revealed the effect of H2O2 on the internal structure of the sol and film formation process,while the structure,surface morphotogy and PL spectra of the films were investigated by using X-ray diffraction,Scanning Electron Microscopy and Photoluminescence.It was suggested that addition of H2O2 results in new zinc complex compound ZnO2 to improve the film formation for sol-gel method.