基于线阵CCD的扫描镜角位置测量技术

Angle Measurement Technique of Scanning Mirror Based on Linear CCD

扫描转镜是现代光电系统中广泛应用的装置。扫描转镜的位置需要精确控制,线阵CCD探测器具有像素高,响应频率高等特点。介绍了以TCD1501C作为光学传感器,利用可编程逻辑器件作为处理单元的角位置测量设计,包括驱动时序、视频输出差分电路、CCD信号检测处理等设计。实现了精度可达到0.02mrad的小角度测量。

The scanning mirror is widely used in optoelectronic system.The location of scanning mirror needes to be controlled finely.The linear CCD has the advantages of high definition and quickly response.The angle measure technique was introduced by using CPLD as processing unit and TCD1501C as sensor,including the driving sequence control design unit,differential signal output circuit unit and CCD signal detection unit.The results show that the measuring accuracy is up to 0.02 mrad.