三面静压转台回转精度干涉测量与误差处理

Interferometry and errors analysis for hydrostatic rotary table measurement of rotary accuracy

介绍了激光干涉法测三面静压转台回转精度的原理及测量方法,分析了激光干涉仪在回转轴运动位置精度测量中的主要误差诱因;作出了角度测量中正弦近似误差特性曲线,并建立了该测量误差的数学模型,为机床的运动精度误差补偿提供了数据。经现场检验,该方案简便易行,成效显著。

The measurement principle of rotary accuracy of hydrostatic rotary table using laser interference method is introduced, and main factors and inducements of errors of the laser interferometer in measuring the precision of rotational axis are analyzed. A curve of sine approximate error in angle measure is devised, a mathematical model of the measurement error is presented. Thus it provides data for the motion precision machine error compensation. This program was simple and effective through the field test verification.