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PET表面镀SiO_x薄膜的研究进展及应用 被引量：1

Research Development and Applicationon of SiO_x Films on PET Substrate
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摘要 综述了采用磁控溅射技术和等离子体增强化学气相沉积技术制备SiOx/聚对苯二甲酸乙二醇酯(PET)薄膜的研究进展,探讨了SiOx/PET薄膜阻隔作用机理,此外还阐述了SiOx/PET薄膜的应用状况。 The research development of SiOx/polyethylene terephthalate（PET） film prepared by magnetron sputtering and plasma enhanced chemical vapor deposition technique are reviewed,the barrier mechanism of SiOx/PET film is discussed. In addition, the application status of SiOx/PET film is also elaborated.
作者 李春伟 曹奇 张义 张志力
机构地区 东北林业大学 陕西威能检验咨询有限公司
出处 《现代塑料加工应用》 CAS 北大核心 2012年第2期56-59,共4页 Modern Plastics Processing and Applications
基金 中央高校基本科研业务费专项资金(DL10BB11) 东北林业大学工程技术学院大学生创新性实验项目(CX_2011_18)
关键词 氧化硅 薄膜 聚对苯二甲酸乙二醇酯 磁控溅射 高阻隔 silicon oxide film polyethylene terephthalate magnetron sputtering high barrier
分类号 TQ320.67 [化学工程—合成树脂塑料工业]
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参考文献18

  • 1韩尔立,陈强,葛袁静,张广秋.SiOx包装阻隔薄膜的发展现状及其制备方法[J].包装工程,2005,26(6):76-78. 被引量：17
  • 2Satoru Iwamori,Yumi Gotoh,Krzysztof Moorthi. Silicon oxide gas barrier films deposited by reactive sputtering[J].Surface and Coatings Technology,2003.24-30.
  • 3Lin M C,Tseng C H,Chang L S. Characterization of the silicon oxide thin films deposited on polyethylenterephthalate substrates by radio frequency reactive magnetron sputtering[J].Thin Solid Films,2007.4596-4602.
  • 4Tomozeiu N,Rheiter H J H. Structure,composition,morphology and electrical properties of amorphous SiOx thin films[J].Thin Solid Films,2008.8205-8209.
  • 5陈强,孙运金,周美丽,韩而立,杨丽珍,张跃飞,李朝阳,许文才.等离子体技术制备氧化硅阻隔层薄膜的研究[J].包装工程,2008,29(10):8-11. 被引量：6
  • 6刘壮,林晶,孙智慧,高德.缠绕式射频磁控溅射聚酯(PET)表面沉积氧化硅(SiO_x)薄膜的研究[J].真空科学与技术学报,2009,29(S1):94-97. 被引量：5
  • 7Howells DG,Henry B M,Leterrier Y. Mechanicel properties of SiOx gas barrier coatings on polyester films[J].Surface and Coatings Technology,2008.3529-3537.
  • 8Bieder A,Gondoin V,Leterrier Y. Mechanical properties of carbon-modified silicon oxide barrier films deposited by plasma enhanced chemical vapor deposition on polymer substrates[J].Thin Solid Films,2007.5430-5438.
  • 9Bieder A,Sonnenfeld A. Influence of film structure and composition on diffusion barrier performance of SiOx thin films deposited by PECVD[J].Surface and Coatings Technology,2006.4564-4571.
  • 10Kim Sungryong,Choudhury Moinul Haque,Kim Wonho. Effects of argon and oxygen flow rate on water vapor barrier properties of silicon oxide coatings deposited on polyethylene terephthalate by plasma enhanced chemical vapor deposition[J].Thin Solid Films,2010.1929-1934.

二级参考文献51

共引文献31

同被引文献15

  • 1Thakar Rucha, Dhawale Ajay. Potential Perspectives of Bio-Based Plastics for Food Packaging Appli- cations: A Review[J]. Popular Plastics & Packaging, 2014, 59(3): 27-31.
  • 2Antoniadis G, Paraskevopoulos K M. Non-Isothermal Crystallization Kinetic ofPoly(Ethylene Terephthalate) / Fumed Silica (PET/SiO2) Prepared by in Situ Poly- merization[J]. Thermochimica Acta, 2010(1/2) : 103- 112.
  • 3Liu Z, Sun Z, Ma X, et al. Characterization of Composite SiOJPolymer Barrier Films[J]. Packaging Technology and Science, 2013, 26(S1): 70-79.
  • 4Samad M Abdul, Satyanarayana Nalam, Sinha Sujeet K. Effect of Air-Plasma Pre-Treatment of Si Substrate on Adhesion Strength and Tribological Properties ofa UHMWPE Film[J]. Journal of Adhesion Science & Technology, 2010, 24(15/16): 2557-2570.
  • 5Wei Chehung, Yen Juiying. Effect of Film Thickness and Interlayer on the Adhesion Strength of Diamond Like Carbon Films on Different Substrates[J]. Diamond and Related Materials, 2007, 16(4/5/6/7): 1325-1330.
  • 6Kim Young Gu, Junichi Tatami, Katsutoshi Komeya, et al. Effect of the Microstructure of Si3N" on the Adhesion Strength of TiN Film on Si3N4[J]. Thin Solid Films, 2006, 510(I/2): 222-228.
  • 7A1-Olayyan Y, Fuchs G E, Baney R, et al. The Effect of Zircaloy-4 Substrate Surface Condition on the Adhesion Strength and Corrosion of SiC Coatings[J]. Journal of Nuclear Materials, 2005, 346(2/3): 109-119.
  • 8Ding Zeliang, Wang Wentao, Sun Min, et al. Study on Interfacial Adhesion Strength of SiOz/PET Composite Packaging Film[J]. Advanced Materials Research, 2014(881/ 882/883) : 882-888.
  • 9Marius Jesdinszki, Carolin Struller, Norbert Rodler. Evaluation of Adhesion Strength Between Thin Aluminum Layer and Poly(Ethylene Terephthalate) Substrate by Peel Tests: A Practical Approach for the Packaging Industry[J]. Journal of Adhesion Science and Technology, 2012, 26: 20-21.
  • 10Lyphout Christophe, Nyl6n Per,(stergren Lars. Relationships Between Process Parameters, Microstructure, and Adhesion Strength of HVOF Sprayed IN718 Coatings [J]. Journal of Thermal Spray Technology, 2011, 20(1/2) : 76-82.

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现代塑料加工应用
2012年 第2期

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