二维多光栅折叠光谱分析仪的研制

Development of the two-dimensional spectrum-folded spectrometer

宽光谱、高分辨、高速光谱获取和分析技术在光电子材料、太阳能、化学、生物医学、环境、国防等领域具有重要的研究意义和应用价值,是现代光谱分析仪器的核心。为了实现宽光谱、高分辨率和快速的光谱测量和分析,在本研究中,突破传统单光栅和棱镜等色散元件有限色散角和光谱效率的限制,采用二维CCD面阵光电探测技术,将具有不同闪耀角和色散特性的10光栅进行集成组合,在200～1000nm光谱区,获得10重折叠光谱,成像在CCD面阵探测器的焦平面上,从而将光谱的有效探测区长度扩展了10倍,达到268mm。经系统定标后,测量结果显示,无需任何机械位移部件,新的光谱分析系统可达到优于0.1nm的分辨率,能够在0.1s时间内完成200～1000nm全光谱数据的快速获取和分析,将能够在科学研究和高科技领域获得重要应用,体现了高性能光谱分析技术研究和发展的趋势。

The optical spectral acquisition and analysis with the features of the broad spectral working region, high resolution and high speed are thekey technologies of the modern spectrometer significantly applied in the fields of the photonic material, solar energy, chemistry, biomedicalscience, environment, defense, and so on. By breaking through the limitationof the spectral dispersion and efficiency in the traditional spectrometerswith grating and prism dispersion elements, in this work, the two-dimensional CCD array detector combined with 10 gratings with differentblazed angles and dispersion features is used, and thus the effective photonsensing area is extended to about 268mm along the dispersion direction withthe spectrum densely folded by 10 times to cover the full 200-1000nm workingwavelength region without any mechanical moving element. The system has aspectral resolution and acquisition time of better than 0. lnm and less than 0. 1s, respectively. The spectrometer will have the advantage to be used forrapid spectral extraction and analysis in the science and high technologyfields, presenting a trend of research and development of the highperformance spectrometer in the future.