摘要
采用双层辉光离子渗金属技术,在硬质合金基体表面上制备了氮化钛(TiN)薄膜,通过微观结构和显微硬度分析,研究了基体温度对TiN薄膜性能的影响.实验结果表明:所有TiN样品均具有面心立方结构,并且薄膜生长的择优取向、晶粒尺寸、晶面间距、晶格常数和微观硬度等都与基体温度密切相关.当基体温度为650~780℃时,TiN薄膜具有最小的晶粒尺寸(26.9 nm)和最大的显微硬度(2204 HV).
Titanium nitride(TiN) films were directly deposited on the surface of hard alloy tools(YG8) using the double-glow discharge plasma surface alloying technique.The influence of substrate temperature on the microstructural and mechanical properties of TiN films was investigated by X-ray diffraction(XRD) and microhardness test.Experimental results demonstrate that the prepared TiN films are all the face-centered cubic(fcc) structure,and that the substrate temperature significantly affects the preferred orientation,crystallite size,plane spacing,lattice constant and microhardness of the films.The TiN film deposited at substrate temperature of 650~780 ℃ has the maximum microhardness of 2204 HV and the minimum crystallite size of 26.9 nm.
出处
《中南民族大学学报(自然科学版)》
CAS
2012年第1期66-70,共5页
Journal of South-Central University for Nationalities:Natural Science Edition
基金
湖北省自然科学基金资助项目(2011CDB418)
中南民族大学学术团队基金资助项目(XTZ09003)
中央高校基本科研业务费专项资金资助项目(CZZ11001)
关键词
双层辉光离子渗金属技术
氮化钛薄膜
微观结构
double-glow discharge plasma surface alloying technique
titanium nitride films
microstruture