二次离子质谱仪测量扩散曲线时“零曲线”的分离

DECONVOLUTION OF THE “ZERO PROFILE” FROM THE DIFFUSION PROFILE MEASURED BY SECONDARY ION MASS SPECTROSCOPY

二次离子质谱仪测量的元素深度分布曲线受离子注入引发的原子混合、坑壁、晶体取向以及表面粗糙度等因素的影响,使得实测曲线偏离真实元素分布曲线.通过测量扩散退火前溶质原子在样品中的分布曲线,即"零曲线",可以表征各种因素的综合效果.本文提出一种使用Fourier级数解卷积的方法有效地从实测曲线中分离"零曲线"的影响,得到元素的真实分布曲线的方法.并利用此法分析了Zn在粗晶Cu及用动态塑性变形方法制备的纳米结构纯Cu中扩散的浓度-深度分布曲线.

The depth profile measured by secondary ion mass spectroscopy is influenced by factors such as the atomic mixing caused by ion injection,the crater edge,the crystallographic orientation of grains and the surface roughness etc.,resulting in the deviation of the measured profile from the real distribution of the solute atoms.A depth profile measured before diffusion annealing or the ＂zero profile＂ is a comprehensive characterization of all the factors that influence the depth profile after annealing.In the present study,a mathematic method using Fourier serials to effectively deconvolute the real profile from the measured profile and ＂zero profile＂ is proposed.And the effects of ＂zero profile＂ on the diffusion properties of Zn in a coarse grained Cu and a nanostructured Cu produced by dynamic plastic deformation（DPD） at liquid nitrogen temperature（LNT） are analyzed with the above method.