甲基氯硅烷中M_2、M_1、M_3、MH的气相色谱定量分析

Quantitative Analysis of M_2,M_1,M_3,MH in Methyl Chlorosilane Mixture with Chromatograph

用气相色谱 ,以苯为内标物 ,采用内标法对甲基氯硅烷中 (CH3 ) 2 SiCl2 、CH3 SiCl3 、 (CH3 ) 3 SiCl、CH3 SiHCl2 进行定量分析 ,测定结果准确稳定 ,分析时间短 。

The contents of dimethyldichlorosilane (M 2 for abbreviation),methyltrichlorosilane(M 1 for abb.),trimethylchlorosilane(M 3 for abb.)and methylhydrodichlorosilane(MH for abb.) in methyl chlorosilane mixture were quantitatively analyzed with chromatograph by adopting internal standard method and using benzene as internal standard.