摘要
采用等离子体型反应离子镀膜技术在经离子掺金的试件上镀制SiO2 、SiO2 TiO2 透明陶瓷膜 ,并对该膜进行电子探针成分定量分析、薄膜X射线衍射分析、透明陶瓷保护膜硬度测试和磨损实验。
Transparent SiO 2, SiO 2 TiO 2 ceramic coatings were synthesized using plasma reactive ion plating technique on samples pretreated with gold ion plating. Coatings were characterized using EPMA for composition measurement, X ray diffraction for structure analysis. Hardness and wear resistance tests were also performed.
出处
《电镀与环保》
CAS
CSCD
北大核心
2000年第3期28-29,共2页
Electroplating & Pollution Control
关键词
透明陶瓷膜
等离子体
磁控溅射
离子镀膜
Transparent ceramic coating Plasma arc plating Magnetron sputtering ion plating Plasma reactive ion plating