摘要
介绍了一种用于太阳能电池高阻扩散工艺的扩散炉温度控制系统,该系统结构简单,控制效果良好,能满足60Ω以上高阻的生产要求。
The system of temperature control for diffusion furnace has been introduced in this paper,which is used for solar cell diffusion process.This system is simple in structure and good control result.It can satisfy produc-tion requirements for the above 60 Ω high resistance.
出处
《电子工业专用设备》
2012年第4期20-23,共4页
Equipment for Electronic Products Manufacturing
关键词
串级控制
扩散炉
PID
Cascade control
Diffusion furnace
PID
