驱动电极位置对扭转式静电微执行器Pull-in行程的影响

Effect of Electrode Location on Pull-in Range of Torsion Electrostatic Microactuators

Pull-in失稳问题是静电微执行器的关键问题之一。为了提高静电微执行器的Pull-in稳定行程,提出了一些方法,例如采用串联电容等。对于扭转式静电微执行器,提出通过改变驱动电极位置的方法来改变Pull-in位置与Pull-in电压,导出了驱动电极位置与Pull-in参数的计算模型。实例计算结果表明,改变电极位置可以使扭转式静电微执行器达到满行程。这些结果对于扭转式静电微执行器Pull-in位置的设计具有较好的参考价值。

Predicting pull-in parameters is crucial in the design of MEMS actuators.Many methods,such as capacitor in series with MEMS device,were proposed to extend stable range of electrostatic microactuators.In this paper,an approach was proposed to extend stable range of torsion electrostatic microactuator by changing location of driving electrode.Pull-in equations for the device were derived.Results of a case study demonstrated that the torsion actuator could reach full range by changing location of electrode.