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A Model for Extreme Ultraviolet Radiation Conversion Efficiency From Laser Produced Mass-Limited Tin-Based Droplet Target Plasmas

A Model for Extreme Ultraviolet Radiation Conversion Efficiency From Laser Produced Mass-Limited Tin-Based Droplet Target Plasmas
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摘要 Simple arguments are used to construct a model to explain the extreme ultraviolet radiation conversion efficiency(EUV-CE) of a tin-based droplet target laser produced plasmas by calculating the laser absorption efficiency,radiation efficiency,and spectral efficiency.The dependence of drive laser pulse duration and laser intensity on EUV-CE is investigated.The results show that at some appropriate laser intensity,where the sum energy of the thermal conduction,out-off band radiation and plasma plume kinetic losses is at a minimum,the EUV-CE should reach a maximum.The EUV-CE predicted by the present simple model is also compared with the available experimental and simulation data and a fair agreement between them is found.
出处 《Communications in Theoretical Physics》 SCIE CAS CSCD 2012年第4期695-700,共6页 理论物理通讯(英文版)
基金 Supported by the National Natural Science Foundation of China under Grant No. 61078024
关键词 conversion efficiency laser produced plasma extreme ultraviolet lithography 激光转换效率 等离子体激光 模型制作 紫外辐射 液滴 锡基 UV技术 脉冲持续时间
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